Location History:
- Narita, JP (2002)
- San Jose, CA (US) (2020 - 2024)
Company Filing History:
Years Active: 2002-2025
Title: Innovations of Keiichi Tanaka
Introduction
Keiichi Tanaka is a prominent inventor based in San Jose, California, known for his significant contributions to the field of semiconductor technology. With a total of 11 patents to his name, Tanaka has made remarkable advancements that enhance manufacturing processes in the industry.
Latest Patents
Among his latest patents is the method for self-aligned double patterning with spatial atomic layer deposition. This innovative approach includes feature trimming and is performed in a single batch processing chamber, allowing for lateral movement of the substrate between sections separated by gas curtains. Each section can independently maintain specific process conditions. Another notable patent involves methods and systems to modulate film stress. This invention provides apparatus and methods to control the phase of power sources for plasma process regions in a batch process chamber, utilizing a master exciter that adjusts the phase based on feedback from match circuits.
Career Highlights
Tanaka is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work focuses on developing advanced technologies that improve the efficiency and effectiveness of semiconductor manufacturing.
Collaborations
Throughout his career, Tanaka has collaborated with esteemed colleagues, including Mihaela A Balseanu and Li-Qun Xia, contributing to various innovative projects and patents.
Conclusion
Keiichi Tanaka's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.