The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2021
Filed:
Oct. 19, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Mark Saly, Santa Clara, CA (US);
Keiichi Tanaka, San Jose, CA (US);
Eswaranand Venkatasubramanian, Santa Clara, CA (US);
Mandyam Sriram, San Jose, CA (US);
Bhaskar Jyoti Bhuyan, San Jose, CA (US);
Pramit Manna, Sunnyvale, CA (US);
David Thompson, San Jose, CA (US);
Andrew Short, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods for depositing film comprising exposing a substrate surface to an organic-based poisoning agent to preferentially inhibit film growth at the top of a feature relative to the bottom of the feature and depositing a film. The substrate can be exposed to the poisoning agent any number of times to promote bottom-up growth of the film in the feature.