Kazuo Kawamura

Title: Kazuo Kawamura: Innovator in Semiconductor Manufacturing

Introduction

Kazuo Kawamura is a prominent inventor based in Kawasaki, Japan, known for his significant contributions to the field of semiconductor manufacturing. With a total of 14 patents to his name, Kawamura has developed innovative methods that enhance the efficiency and effectiveness of semiconductor devices.

Latest Patents

Among his latest patents is a method of manufacturing a semiconductor device. This method involves forming a transistor that includes a gate electrode and a source/drain diffused layer over a semiconductor substrate. It also includes forming a nickel platinum film over the semiconductor substrate, covering the gate electrode and the source/drain diffused layer. The process makes use of a first thermal processing step to react the nickel platinum film with the source/drain diffused layer, resulting in the formation of a nickel platinum silicide film. Additionally, an unreacted part of the nickel platinum film is removed using a chemical liquid at a temperature of 71°C or more containing hydrogen peroxide. Another notable patent is a method of manufacturing a semiconductor device that includes forming a dielectric film with a first opening and a second opening located within the first opening. This method also involves etching a first metal film at the bottom of the second opening using a sputtering process and burying a conductive material in both openings.

Career Highlights

Kawamura has had a distinguished career, working with leading companies in the semiconductor industry. He has been associated with Fujitsu Semiconductor Limited and Fujitsu Corporation, where he has contributed to various innovative projects and advancements in semiconductor technology.

Collaborations

Throughout his career, Kawamura has collaborated with notable professionals in the field, including Shinichi Akiyama and Yasunori Uchino. These collaborations have further enriched his work and contributed to the development of cutting-edge semiconductor technologies.

Conclusion

Kazuo Kawamura's innovative work in semiconductor manufacturing has made a significant impact on the industry. His patents reflect a deep understanding of semiconductor technology and a commitment to advancing the field. His contributions continue to influence the development of efficient semiconductor devices.