Inventors with similar research interests:
Location History:
- Jyoetsu, JP (2012 - 2013)
- Joetsu, JP (2011 - 2024)
Company Filing History:
Years Active: 2011-2025
Title: The Innovative Geniuses of Kazuhiro Katayama
Introduction
Kazuhiro Katayama, based in Joetsu, Japan, is a prominent inventor with an impressive portfolio of 56 patents. His work focuses on advancements in chemical engineering and lithography processes, which are crucial in the semiconductor industry. Katayama's contributions have significantly impacted the development of more efficient and effective materials used in photolithography.
Latest Patents
One of Katayama's latest patents introduces a novel sulfonium salt that enhances photolithography processes. This sulfonium salt, represented by a unique formula, is featured in a chemically amplified resist composition. The composition offers remarkable benefits, including enhanced solvent solubility and improved lithography attributes such as exposure latitude (EL) and line width roughness (LWR) when exposed to high-energy radiation from sources like KrF or ArF excimer lasers, electron beams, or extreme ultraviolet (EUV) light.
Additionally, Katayama has developed a molecular resist composition that comprises a betaine-type onium compound paired with an organic solvent. This innovative resist composition is free from base resins, thus addressing issues commonly associated with traditional compositions. When processed using KrF, ArF excimer laser, electron beam lithography, or EUV, this invention demonstrates improved dissolution contrast, exposure latitude, modulation transfer function (MEF), and line width roughness.
Career Highlights
Kazuhiro Katayama is a key figure at Shin-Etsu Chemical Co., Ltd., where he has played an essential role in pioneering research and development efforts. His 56 patents reflect his commitment to advancing the field of lithographic materials, providing the industry with innovative solutions that enhance performance and efficiency.
Collaborations
Throughout his career, Katayama has collaborated with esteemed colleagues such as Jun Hatakeyama and Koji Hasegawa. Their joint efforts in research and development have led to significant advancements in chemical compositions and applications within the semiconductor industry, further establishing their reputations as leaders in innovation.
Conclusion
Kazuhiro Katayama exemplifies the spirit of innovation in the world of chemical engineering and semiconductor technology. His numerous patents and groundbreaking work at Shin-Etsu Chemical Co., Ltd., along with collaborative efforts with notable peers, highlight his influence on contemporary lithography practices. Katayama's contributions continue to push the boundaries of what is possible in the field, ensuring a brighter future for semiconductor manufacturing.
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