The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Dec. 17, 2019
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Jun Hatakeyama, Joetsu, JP;
Masaki Ohashi, Joetsu, JP;
Masahiro Fukushima, Joetsu, JP;
Takayuki Fujiwara, Joetsu, JP;
Kazuhiro Katayama, Joetsu, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/038 (2006.01); G03F 7/004 (2006.01); C08L 33/14 (2006.01); C08L 25/06 (2006.01); C08G 61/02 (2006.01); C08L 33/08 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0382 (2013.01); C08G 61/02 (2013.01); C08L 25/06 (2013.01); C08L 33/08 (2013.01); C08L 33/14 (2013.01); G03F 7/0045 (2013.01); G03F 7/2004 (2013.01); C08G 2261/3222 (2013.01);
Abstract
A resist composition comprising an iodized base polymer and an iodized benzene ring-containing quencher has a high sensitivity and improved LWR and CDU.