The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2025
Filed:
Apr. 23, 2020
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Masayoshi Sagehashi, Joetsu, JP;
Takayuki Fujiwara, Joetsu, JP;
Masahiro Fukushima, Joetsu, JP;
Masaki Ohashi, Joetsu, JP;
Kazuhiro Katayama, Joetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07C 309/12 (2005.12); C07C 317/06 (2005.12); G03F 7/004 (2005.12); G03F 7/029 (2005.12); G03F 7/038 (2005.12); G03F 7/039 (2005.12); G03F 7/32 (2005.12);
U.S. Cl.
CPC ...
C07C 317/06 (2012.12); G03F 7/0045 (2012.12); G03F 7/029 (2012.12); G03F 7/0382 (2012.12); G03F 7/0392 (2012.12); G03F 7/322 (2012.12);
Abstract
An onium salt of formula (1) and a chemically amplified resist composition comprising the same as a PAG are provided. When processed by lithography, the resist composition exhibits a high sensitivity, minimal LWR and improved CDU independent of whether it is of positive or negative tone.