The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2018
Filed:
Apr. 17, 2017
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Masahiro Fukushima, Joetsu, JP;
Kazuhiro Katayama, Joetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/038 (2006.01); G03F 7/004 (2006.01); G03F 7/09 (2006.01); G03F 7/16 (2006.01); G03F 7/32 (2006.01); G03F 7/20 (2006.01); G03F 7/38 (2006.01); C07C 59/115 (2006.01); C07C 69/753 (2006.01); C07C 381/12 (2006.01); C07D 307/00 (2006.01); C07D 493/18 (2006.01); G03F 7/11 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 59/115 (2013.01); C07C 69/753 (2013.01); C07C 381/12 (2013.01); C07D 307/00 (2013.01); C07D 493/18 (2013.01); G03F 7/0046 (2013.01); G03F 7/0048 (2013.01); G03F 7/0382 (2013.01); G03F 7/091 (2013.01); G03F 7/11 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2006 (2013.01); G03F 7/2041 (2013.01); G03F 7/322 (2013.01); G03F 7/325 (2013.01); G03F 7/38 (2013.01); C07C 2603/68 (2017.05); C07C 2603/74 (2017.05);
Abstract
A carboxylic acid onium salt of formula (1) exerts a satisfactory acid diffusion control (or quencher) function. A resist composition comprising the carboxylic acid onium salt can be processed by DUV or EUV lithography to form a resist pattern with improved resolution, reduced LWR and minimal defects after development.