Location History:
- Yamanashi-Ken, JP (1999)
- Ryuo-cho, JP (2000)
- Yamanashi, JP (2009 - 2012)
- Nirasaki, JP (2002 - 2013)
Company Filing History:
Years Active: 1999-2013
Title: Innovations of Jun Ooyabu
Introduction
Jun Ooyabu is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing, holding a total of 12 patents. His work focuses on enhancing the efficiency and effectiveness of plasma processing methods and apparatuses.
Latest Patents
One of his latest patents is a plasma processing method and apparatus. This method is designed to supply a predetermined process gas into a plasma generation space where a target substrate is placed. The process gas is then converted into plasma, allowing the substrate to undergo a specific plasma process. Notably, the spatial distribution of plasma density and the density of radicals in the plasma can be controlled independently, ensuring a uniform process state across the entire surface of the substrate.
Another significant patent involves a flow rate control system and shower plate used for a partial pressure control system. This system includes two valves branched from an operation gas supply pipe, which variably control the operation gas. Pressure sensors connected to each valve detect the operation gas pressure, while a controller proportionally manages the valves based on the pressure sensor readings. This innovative configuration reduces wasteful consumption of operation gas and enhances responsiveness to changes in settings.
Career Highlights
Jun Ooyabu is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this company has allowed him to develop and refine his innovative ideas in plasma processing technology.
Collaborations
Throughout his career, Jun has collaborated with notable colleagues, including Akira Koshiishi and Jun Hirose, who is a woman. These collaborations have contributed to the advancement of technology in their respective fields.
Conclusion
Jun Ooyabu's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his innovative spirit and dedication to advancing the field. His inventions continue to influence the industry and pave the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.