The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2012
Filed:
Jul. 31, 2008
Hideki Nagaoka, Yamanashi, JP;
Hiroshi Koizumi, Yamanashi, JP;
Jun Ooyabu, Yamanashi, JP;
Tsuyoshi Shimazu, Yamanashi, JP;
Hiroki Endo, Yamanashi, JP;
Keiki Ito, Yamanashi, JP;
Daisuke Hayashi, Yamanashi, JP;
Hideki Nagaoka, Yamanashi, JP;
Hiroshi Koizumi, Yamanashi, JP;
Jun Ooyabu, Yamanashi, JP;
Tsuyoshi Shimazu, Yamanashi, JP;
Hiroki Endo, Yamanashi, JP;
Keiki Ito, Yamanashi, JP;
Daisuke Hayashi, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A partial pressure control systemincludes two valveswhich are branched from an operation gas supply pipeand which variably control operation gas, pressure sensorswhich are respectively connected to the each valvesin series and which detect pressure of the operation gas, and a controllerwhich proportionally controls the operation of the valvesbased on detection result of the pressure sensors, thereby relatively controlling pressures Pand Pof the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.