This inventor holds 23 USPTO granted patents and 7 published patent applications, primarily in Cryogenic Fluid Treatment. Top assignees: Fsi International, Inc., Tel Fsi, Inc., Tel Manufacturing and Engineering of America, Inc.. Active years: 1996-2022.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Chanhassen, MN (US) (1996 - 2000)
- Eden Prarie, MN (US) (2015)
- Eden Prairie, MN (US) (2000 - 2022)
Company Filing History:

Years Active: 1996-2022
Areas of Expertise:
Title: Jeffery W. Butterbaugh – Innovator in Semiconductor Technologies
Introduction
Jeffery W. Butterbaugh is an esteemed inventor based in Eden Prairie, Minnesota, known for his significant contributions to semiconductor technologies. With an impressive portfolio of 23 patents, he has become a recognized figure in the engineering community, developing innovative solutions that address critical challenges in the field.
Latest Patents
Among his latest patents, Butterbaugh has developed systems and methods for rotating and translating a substrate within a process chamber. This invention focuses on a handling system designed to move semiconductor substrates during treatment, allowing for both back-and-forth motion in an arc and simultaneous rotation around the substrate's center. Another notable patent involves systems and methods for treating substrates with cryogenic fluid mixtures. This technology enhances the surface treatment of microelectronic substrates by utilizing a cryogenic fluid mixture, which can be expanded to form an aerosol spray or gas cluster jet (GCJ) spray, effectively removing particles from the surface of the substrates.
Career Highlights
Butterbaugh has played a key role in the progress of companies like FSI International, Inc. and Tel FSI, Inc. Throughout his career, he has focused on advancing the technology and techniques used in the semiconductor industry, contributing to innovative solutions that have elevated manufacturing processes.
Collaborations
Jeffery W. Butterbaugh has collaborated with notable professionals in the field, including David C. Gray and Chimaobi W. Mbanaso. Their teamwork and shared expertise have fostered innovative developments that have been instrumental in addressing industry needs.
Conclusion
With a wealth of experience and a strong dedication to innovation, Jeffery W. Butterbaugh continues to be a prominent inventor in the semiconductor arena. His patents reflect a commitment to enhancing manufacturing processes, demonstrating the impact of his work in shaping the future of technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile