For the Inventor, By the Inventor

Enter assignee name

Chaska, MN, United States of America

Tel Fsi, Inc.

USPTO Granted Patents = 35

% Expired Patents = 37.1

Trademarks = 5

Forward Citations = 79

Loading Chart...

Loading Chart...

34 inventors (with patents filed for the assignee):

Alan Dee Rose (11 out of 18 patents)

Jimmy D Collins (10 out of 13 patents)

Jeffery W Butterbaugh (8 out of 23 patents)

4. Tracy A Gast (7 out of 12 patents)

5. David Dekraker (6 out of 9 patents)

6. Chimaobi W Mbanaso (5 out of 8 patents)

7. David Scott Becker (5 out of 8 patents)

8. David P DeKraker (5 out of 5 patents)

9. Kevin L Siefering (4 out of 16 patents)

10. Jeffrey M Lauerhaas (4 out of 5 patents)

11. Edward Hanzlik (3 out of 8 patents)

12. William P Inhofer (3 out of 6 patents)

13. Anthony S Ratkovich (3 out of 3 patents)

14. Samuel A Cooper (3 out of 3 patents)

15. James M Eppes (3 out of 4 patents)

Core Competencies:

Cryogenic Fluid Sprays

Microelectronic Substrates

Wafer Processing

Etching Solutions

Fluid Stream Scanning

Substrate Temperature Control

Hydrophilicity Treatment

Material Removal

Nozzle Devices

Barrier Structures

Rinsing Methodologies

Treatment Fluids

35 patents: Sort by Forward Citations

1. 10748789 - Systems and methods for treating substrates with cryogenic fluid mixtures (2020-08-18),

2. 10748788 - System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays (2020-08-18),

3. 10625280 - Apparatus for spraying cryogenic fluids (2020-04-21),

4. 10418270 - Wafer edge lift pin design for manufacturing a semiconductor device (2019-09-17),

5. 10062596 - Systems and methods for treating substrates with cryogenic fluid mixtures (2018-08-28),

6. 10020217 - Systems and methods for treating substrates with cryogenic fluid mixtures (2018-07-10),

7. 10020207 - Apparatus and method for scanning an object through a fluid stream (2018-07-10),

8. 10014191 - Systems and methods for treating substrates with cryogenic fluid mixtures (2018-07-03),

9. 9982664 - Systems and methods for metering a dose volume of fluid used to treat microelectronic substrates (2018-05-29),

10. 9911631 - Processing system and method for providing a heated etching solution (2018-03-06),

11. 9887107 - Methodologies for rinsing tool surfaces in tools used to process microelectronic workpieces (2018-02-06),

12. 9831107 - Processing system and method for providing a heated etching solution (2017-11-28),

13. 9691628 - [object Object] (2017-06-27),

14. 9666456 - Method and apparatus for treating a workpiece with arrays of nozzles (2017-05-30),

15. 9564378 - Detection of lost wafer from spinning chuck (2017-02-07),

Tel Fsi, Inc. is a technology company based in Chaska, Minnesota, specializing in advanced solutions for the semiconductor and electronics industries. The organization focuses on developing innovative manufacturing processes and equipment that enhance production efficiency and product quality. With a commitment to research and development, Tel Fsi aims to address the evolving needs of its clients through cutting-edge technologies and tailored solutions, contributing significantly to the advancement of the electronics sector.

Profile summary based on public USPTO records.

Company Badge

USPTO Data Jan 1 1976 - Oct 6 2026

35 Patents

#5 in Chaska, MN

#273 in Minnesota

#9,740 in US

#19,148 in the World

Chaska, MN, United States of America

Tel Fsi, Inc.

Forward Citations = 79

34 inventors:

Alan Dee Rose (11 out of 18 patents)

Jimmy D Collins (10 out of 13 patents)

Jeffery W Butterbaugh (8 out of 23 patents)

4. Tracy A Gast (7 out of 12 patents)

5. David Dekraker (6 out of 9 patents)

Please report any incorrect information to [email protected]

Loading…