This inventor holds 5 USPTO granted patents and 4 published patent applications. Top assignees: Tel Fsi, Inc., Fsi International, Inc.. Active years: 2012-2020.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2012-2020
Title: Innovations by Jeffrey M Lauerhaas
Introduction
Jeffrey M Lauerhaas is an accomplished inventor based in Waconia, MN (US). He holds a total of five patents, showcasing his expertise in the field of microelectronics. His innovative contributions have significantly advanced the methods used in treating microelectronic substrates.
Latest Patents
One of his latest patents is a system and method for monitoring the treatment of microelectronic substrates with fluid sprays, including cryogenic fluid sprays. This invention describes a system that effectively removes particles from the surface of a microelectronic substrate. The system comprises a vacuum process chamber, a substrate stage for supporting the substrate, a cryogenic fluid supply system, and a process monitoring system that collects data on the fluid spray attributes.
Another notable patent involves tools and methods for processing microelectronic workpieces using process chamber designs that can easily transition between open and closed modes of operation. This invention outlines strategies for tool designs that allow for on-demand operation in either mode. The tools utilize environmentally controlled pathways and air amplification capabilities to manage airflow into the process chambers. Additionally, the design includes innovative sealing techniques using flowing gas curtains.
Career Highlights
Throughout his career, Jeffrey has worked with notable companies such as Tel FSI, Inc. and FSI International, Inc. His experience in these organizations has contributed to his development as a leading inventor in the microelectronics sector.
Collaborations
Jeffrey has collaborated with talented individuals such as Jimmy D Collins and Tracy A Gast. These partnerships have likely fostered a creative environment that has led to significant advancements in their respective fields.
Conclusion
Jeffrey M Lauerhaas is a prominent inventor whose work in microelectronics has resulted in several innovative patents. His contributions continue to influence the industry and pave the way for future advancements.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile