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Chaska, MN, United States of America

Fsi International, Inc.

USPTO Granted Patents = 102

Trademarks = 4

Forward Citations = 4,304

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127 inventors (with patents filed for the assignee):

Kurt Karl Christenson (16 out of 21 patents)

Robert T Fayfield (11 out of 16 patents)

Jeffery W Butterbaugh (10 out of 23 patents)

4. Kevin L Siefering (9 out of 16 patents)

5. Steven L Nelson (9 out of 10 patents)

6. Brent D Schwab (8 out of 9 patents)

7. Thomas J Wagener (8 out of 25 patents)

8. David C Gray (7 out of 12 patents)

9. Tracy A Gast (5 out of 12 patents)

10. Natarajan Ramanan (5 out of 6 patents)

11. John M Heitzinger (4 out of 10 patents)

12. Kevin G Kemp (4 out of 8 patents)

13. Vuong P Nguyen (4 out of 4 patents)

14. Daniel J Syverson (4 out of 4 patents)

15. Alan Dee Rose (3 out of 18 patents)

Core Competencies:

Microelectronic Workpieces

Substrate Processing

Electroless Plating

Wafer Treatment

Rinsing Methodologies

Thermal Processing

Robotic Systems

Surface Conditioning

Selective Etching

Fluid Delivery Systems

Oxide Layer Growth

UV Wafer Heating

102 patents: Sort by Forward Citations

1. 8235068 - Substrate processing systems and related methods (2012-08-07),

2. 8235062 - Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation (2012-08-07),

3. 8142571 - Process for treatment of semiconductor wafer using water vapor containing environment (2012-03-27),

4. 8104425 - Reagent activator for electroless plating (2012-01-31),

5. 8070884 - Methods for rinsing microelectronic substrates utilizing cool rinse fluid within a gas enviroment including a drying enhancement substance (2011-12-06),

6. 7913706 - Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses (2011-03-29),

7. 7819984 - Process for treatment of substrates with water vapor or steam (2010-10-26),

8. 7735378 - Method to measure flow line return fluid density and flow rate (2010-06-15),

9. 7681581 - Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids (2010-03-23),

10. 7592264 - Process for removing material from substrates (2009-09-22),

11. 7556697 - System and method for carrying out liquid and subsequent drying treatments on one or more wafers (2009-07-07),

12. 7476616 - Reagent activator for electroless plating (2009-01-13),

13. 7425505 - Use of silyating agents (2008-09-16),

14. 7422031 - Rotary unions, fluid delivery systems, and related methods (2008-09-09),

15. 7404681 - Coating methods and apparatus for coating (2008-07-29),

FSI International, Inc. is a global leader in providing advanced wafer cleaning systems and solutions for the semiconductor manufacturing industry. With decades of industry experience, FSI offers innovative and cost-effective solutions that ensure the highest levels of cleanliness and yield for their customers' production processes. Their state-of-the-art technology, coupled with extensive expertise, enables FSI to meet the evolving needs of the semiconductor industry and drive the growth of advanced device manufacturing. Visit their website to learn more about FSI International, Inc. and their world-class wafer cleaning solutions.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

102 Patents

#1 in Chaska, MN

#91 in Minnesota

#3,581 in US

#7,426 in the World

Chaska, MN, United States of America

Fsi International, Inc.

Forward Citations = 4,304

127 inventors:

Kurt Karl Christenson (16 out of 21 patents)

Robert T Fayfield (11 out of 16 patents)

Jeffery W Butterbaugh (10 out of 23 patents)

4. Kevin L Siefering (9 out of 16 patents)

5. Steven L Nelson (9 out of 10 patents)

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