The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Jun. 14, 2004
Applicants:
Arne C. Benson, Shakopee, MN (US);
Erik D. Olson, Shakopee, MN (US);
Douglas S. Spaeth, Chaska, MN (US);
Inventors:
Arne C. Benson, Shakopee, MN (US);
Erik D. Olson, Shakopee, MN (US);
Douglas S. Spaeth, Chaska, MN (US);
Assignee:
FSI International, Inc., Chaska, MN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); B08B 5/04 (2006.01); C25F 3/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
Systems for processing microelectronic substrates in a process chamber that incorporate improved technology for transitioning from a wet process to a dry process (especially transitioning from rinsing to drying). At least a portion of residual liquid remaining in fluid supply lines after a wet treatment is removed via a pathway that avoids purging directly onto the substrates. Related methods are also included in the present invention.