Arne C Benson

Title: Arne C Benson: Innovator in Microelectronic Processing Technologies

Introduction

Arne C Benson is a notable inventor based in Shakopee, MN (US). He has made significant contributions to the field of microelectronics, particularly in the processing of substrates. With a total of 3 patents to his name, Benson's work has advanced the technology used in various applications.

Latest Patents

Benson's latest patents include a system and method for carrying out liquid and subsequent drying treatments on one or more wafers. This invention focuses on improving the technology for transitioning from a wet process to a dry process, especially during the rinsing and drying phases. The method ensures that residual liquid in fluid supply lines is effectively removed without purging directly onto the substrates. Another significant patent involves rotary unions and fluid delivery systems. This invention features a rotary union that includes a housing, a rotor, and a post, allowing for efficient fluid conveyance. The design incorporates a bearing to facilitate the rotor's movement and an annular gap that serves as part of a drain fluid pathway.

Career Highlights

Benson has been associated with Fsi International, Inc., where he has applied his expertise in microelectronic processing. His innovative approaches have contributed to the company's advancements in technology and product offerings.

Collaborations

Throughout his career, Benson has collaborated with notable colleagues, including Edward Hanzlik and Michael Volovets. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Arne C Benson's contributions to microelectronic processing technologies highlight his role as a significant inventor in the field. His patents reflect a commitment to improving processes and systems that are essential for the advancement of microelectronics.