The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 26, 2004

Filed:

Dec. 26, 2001
Applicant:
Inventors:

Michael Volovets, Eden Prairie, MN (US);

Arne Benson, Shakopee, MN (US);

Assignee:

FSI International, Inc., Chaska, MN (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 3/32 ;
U.S. Cl.
CPC ...
F16K 3/32 ;
Abstract

A valve and a valve assembly are provided that exhibit both highly controlled metering of fluid, as well as a high volume of fluid flow when the valve is in the fully open position. The regulating portion of the valve is provided with channels having different cross-sectional shapes, or channels having different lengths to provide staged flow. The valve is further provided with a fluid boundary element that is movably operably connected to the valve for mounting the valve to the valve body.


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