Location History:
- San Jose, CA (US) (2001 - 2002)
- Allen, TX (US) (2005)
Company Filing History:
Years Active: 2001-2005
Title: Innovations by Vuong P Nguyen
Introduction
Vuong P Nguyen is a notable inventor based in Allen, TX (US), recognized for his contributions to thermal processing technologies. With a total of four patents to his name, Nguyen has made significant advancements in methods and apparatuses that enhance the performance of microelectronic devices.
Latest Patents
Nguyen's latest patents include a thermal process station with a heated lid, which focuses on improving the temperature uniformity of a workpiece being processed on a heated platen. This innovative design incorporates an additional heat source within the housing, which uniformly outputs thermal energy into the process chamber. The heated lid is designed to facilitate gas flow, enhancing the performance of photoresist by providing improved line width control and uniformity across a wafer. Another significant patent involves a thermal processing system and methods for forming low-k dielectric films suitable for microelectronic devices. This method utilizes single wafer processing techniques that incorporate both curing and post-cure, in situ gas cooling.
Career Highlights
Nguyen is currently employed at FSI International, Inc., where he continues to develop cutting-edge technologies in the field of thermal processing. His work has been instrumental in advancing the capabilities of microelectronic manufacturing.
Collaborations
Nguyen collaborates with talented professionals such as Jeffrey D Womack and Devendra Kumar, contributing to a dynamic team focused on innovation and excellence in their field.
Conclusion
Vuong P Nguyen's contributions to thermal processing technology exemplify the impact of innovative thinking in the microelectronics industry. His patents reflect a commitment to enhancing manufacturing processes and improving device performance.