Minnetonka, MN, United States of America

Steven L Nelson

USPTO Granted Patents = 10 

Average Co-Inventor Count = 1.9

ph-index = 7

Forward Citations = 186(Granted Patents)


Company Filing History:


Years Active: 1999-2015

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10 patents (USPTO):Explore Patents

Title: Steven L. Nelson: Innovations in Semiconductor Surface Processing

Introduction

Steven L. Nelson, a distinguished inventor based in Minnetonka, Minnesota, is known for his significant contributions to the field of semiconductor technologies. With a portfolio of 10 patents to his name, he has made notable advancements, especially in the area of surface processing techniques that cater to the modern demands of the semiconductor industry.

Latest Patents

One of Steven’s latest patents is titled "Process for increasing the hydrophilicity of silicon surfaces following HF treatment." This pioneering method details an innovative oxide removal process that involves several critical steps. The patented method pertains to providing a substrate with an oxide layer and a patterned mask layer on that oxide. The process includes performing a hydrofluoric (HF) treatment that partially transfers the mask's pattern through the oxide layer, exposing the silicon surface underneath. Following this, an oxidizing agent is administered to modify the silicon surface chemically. The process concludes with the removal of the patterned mask layer, enabling further processing capabilities.

Another significant patent revolves around "Rinsing processes and equipment." This invention outlines methods for rinsing semiconductor devices, particularly wafers, utilizing a surface tension reducing agent. It encompasses a drying step that incorporates the agent during partial drying, preferably executed with automated rinsing equipment. These automated rinsing apparatuses align well with the needs of contemporary manufacturing processes, ensuring efficiency and precision.

Career Highlights

Steven L. Nelson has accumulated extensive experience through his work with prominent companies in the semiconductor field, including FSi International, Inc. and Tel FSi, Inc. His innovative spirit and technical expertise have proven invaluable in these high-tech environments, where he has led or contributed to various groundbreaking projects that have advanced semiconductor processing techniques.

Collaborations

Throughout his career, Steven has collaborated with esteemed professionals, including Kurt Karl Christenson and Lawrence E. Carter. These partnerships have enabled the exchange of ideas and fostered innovations that have been crucial in refining and advancing semiconductor technologies.

Conclusion

Steven L. Nelson continues to be a formidable force in innovation within the semiconductor industry. His patented methods for enhancing surface properties in silicon substrates and his contributions to rinsing processes underscore his status as a leading inventor. With numerous advancements in his repertoire, Nelson's work is a testament to the ongoing evolution of modern technology in semiconductor manufacturing. His dedication to innovation and collaboration sets a high standard for aspiring inventors in the field.

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