Company Filing History:
Years Active: 2013-2018
Title: Home-Been Cheng: Innovator in Semiconductor Technology
Introduction
Home-Been Cheng is a prominent inventor based in Keelung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 11 patents. His innovative methods have advanced the processes involved in semiconductor device fabrication.
Latest Patents
One of Home-Been Cheng's latest patents is a method for forming patterns for semiconductor devices. This method involves several steps, including providing a substrate with a hard mask layer and a sacrificial layer. A plurality of mandrel patterns are formed on the substrate, followed by the formation of spacers on the sidewalls of these mandrel patterns. After removing the mandrel patterns, a series of spacer patterns are directly formed on the sacrificial layer. The process continues with the formation of first blocking layers in the sacrificial layer, and second blocking layers that expose portions of both the sacrificial layer and the first blocking layers. Finally, the sacrificial layer and the hard mask layer are etched using the spacer patterns and blocking layers as etching masks to create a patterned hard mask layer on the substrate.
Career Highlights
Home-Been Cheng is currently employed at United Microelectronics Corporation, a leading company in the semiconductor industry. His work has been instrumental in developing advanced techniques that enhance the efficiency and effectiveness of semiconductor manufacturing.
Collaborations
Throughout his career, Home-Been Cheng has collaborated with notable colleagues, including Hsin-Yu Chen and Yu-Han Tsai. These collaborations have fostered innovation and contributed to the success of their projects.
Conclusion
Home-Been Cheng's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the advancement of semiconductor manufacturing processes.