Inventors with similar research interests:
Location History:
- Hyogo, JP (1991 - 2007)
- Itami, JP (1991 - 2011)
Company Filing History:
68 out of 10,250 
2 out of 45 
1 out of 987 
Years Active: 1991-2011
Areas of Expertise:
Title: Innovations of Hirohiko Nakata: Pioneering Heating Devices in Semiconductor Manufacturing
Introduction
Hirohiko Nakata, based in Itami, Japan, is a prolific inventor with a remarkable portfolio of 68 patents. His contributions to semiconductor technology have significantly enhanced manufacturing processes, particularly in the areas of heating devices and wafer probers.
Latest Patents
Among Nakata's latest innovations is a patented heating device specifically designed for the manufacturing of semiconductors. This device enables uniform heating of wafers and other materials, which is crucial for processes like heat-hardening resin films used in photolithography and heat-calcining low-dielectric constant insulating films. The design features a ceramic holder with a resistive heating element embedded, which effectively holds and heats wafers. Additionally, the device maintains a uniform atmosphere within a cylindrical support member and chamber by controlling the gas introduction and evacuation.
Another notable patent is the wafer holder for a wafer prober, which improves positional precision and temperature uniformity. This invention allows for rapid heating and cooling of chips, enhancing the efficiency of the probing process. The holder consists of a chuck top with a conducting layer and a support member, creating a specialized cavity that optimizes functionality.
Career Highlights
Nakata’s career includes significant roles at prestigious organizations such as Sumitomo Electric Industries, Limited and Japan Fine Ceramics Center. His work in these companies has solidified his reputation as a leader in semiconductor technology and innovation.
Collaborations
Throughout his career, Nakata has collaborated with esteemed colleagues including Masuhiro Natsuhara and Akira Kuibira. These partnerships have fostered an environment of creativity and problem-solving, leading to advancements in their respective fields.
Conclusion
Hirohiko Nakata's contributions to the semiconductor industry through his inventions exemplify the critical role of innovation in technology. With numerous patents to his name, his work continues to influence the direction of manufacturing processes and set high standards within the industry.