The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
Apr. 09, 2002
Masuhiro Natsuhara, Itami, JP;
Hirohiko Nakata, Itami, JP;
Akira Kuibira, Itami, JP;
Kenji Shinma, Itami, JP;
Masuhiro Natsuhara, Itami, JP;
Hirohiko Nakata, Itami, JP;
Akira Kuibira, Itami, JP;
Kenji Shinma, Itami, JP;
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Abstract
In the substrate processing apparatus, a ceramic module for mounting a substrate has a flat plate portion having an electric circuitry and a ceramic base body, and as at least a part of a surface of the flat plate portion other than the surface mounting the substrate is in contact with a chamber, it is supported by the chamber. Thus, a substrate processing apparatus can be provided which improves thermal uniformity, reduces cost, is suitable for size reduction of the apparatus and which can ease restrictions in mounting a power supply conductive member or the like.