Itami, Japan

Kenji Shinma


Average Co-Inventor Count = 3.7

ph-index = 4

Forward Citations = 41(Granted Patents)


Company Filing History:


Years Active: 2003-2024

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9 patents (USPTO):Explore Patents

Title: Kenji Shinma: A Pioneer in Wafer Holding Technology

Introduction

Kenji Shinma, an innovative inventor based in Itami, Japan, has made significant contributions to the field of semiconductor technology. With a portfolio of nine patents, Shinma's work focuses on advancing wafer holding technology, which is crucial for manufacturing semiconductor devices.

Latest Patents

Among Shinma's latest patents is the "Wafer Holding Body." This advanced wafer holding unit features a disk-shaped ceramic substrate equipped with a wafer mounting surface. It incorporates an RF electrode embedded within the substrate and a metal terminal that is inserted from the substrate's lower surface. A unique connecting terminal facilitates the electrical connection between the RF electrode and the metal terminal, consisting of a ceramic member with a truncated conical shape and a metal layer. The design ensures efficient operation and enhanced performance in wafer handling processes. This invention highlights Shinma's commitment to merging innovative materials and engineering solutions.

Career Highlights

Kenji Shinma is affiliated with Sumitomo Electric Industries, Limited, where he has played a vital role in developing cutting-edge technologies. His extensive experience and technical prowess have established him as a key figure in the semiconductor industry, particularly in the domain of wafer handling units.

Collaborations

Throughout his career, Shinma has collaborated with esteemed colleagues, including Masuhiro Natsuhara and Hirohiko Nakata. These partnerships have fostered a collaborative environment that encourages technological advancement and innovation in their collective areas of expertise.

Conclusion

Kenji Shinma stands out as a prominent inventor in Japan, contributing remarkably to semiconductor technology with his patented innovations. His dedication to enhancing wafer handling systems continues to impact the industry positively, paving the way for future advancements and innovations.

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