The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2009
Filed:
Feb. 02, 2007
Masuhiro Natsuhara, Itami, JP;
Tomoyuki Awazu, Itami, JP;
Hirohiko Nakata, Itami, JP;
Katsuhiro Itakura, Itami, JP;
Masuhiro Natsuhara, Itami, JP;
Tomoyuki Awazu, Itami, JP;
Hirohiko Nakata, Itami, JP;
Katsuhiro Itakura, Itami, JP;
Sumitomo Electric Industries, Ltd., Osaka, JP;
Abstract
A wafer holder is provided having high rigidity and an enhanced heat-insulating effect that allow positional accuracy and heating uniformity to be improved, a chip to be rapidly heated and cooled, and the manufacturing cost to be reduced, and a wafer prober apparatus on which the wafer holder is mounted. The wafer holder of the present invention includes a chuck top for mounting a wafer, a support member for supporting the chuck top, and a stand for supporting the support member. The chuck top has a thermal conductivity Kand a Young's modulus Y; the support member has a thermal conductivity Kand a Young's modulus Y; and the stand has a thermal conductivity Kand a Young's modulus Y. K>Kand K>K; and Y>Yand Y>Y