Hareesh Thridandam

Title: Innovations of Hareesh Thridandam

Introduction

Hareesh Thridandam is a notable inventor based in Vista, California. He has made significant contributions to the field of semiconductor applications, holding a total of 9 patents. His work focuses on enhancing the purity and efficiency of materials used in semiconductor processing.

Latest Patents

Among his latest patents is a method for producing high purity ethylenediamine (EDA) suitable for thin-film semiconductor processing applications. This innovative method purifies EDA to remove water and trace metals, achieving water levels below about 50 ppm by weight through the use of a 3A type molecular sieve in a packed bed. Additionally, metallic impurities are eliminated via distillation, and the final product is packaged in specially dried and optionally pre-conditioned containers. Another significant patent involves a process for plasma enhanced cyclic chemical vapor deposition of silicon-containing films. This invention allows for the deposition of materials such as silicon nitride and silicon carbonitride from alkylaminosilanes, resulting in films with improved properties compared to those produced by traditional thermal chemical vapor deposition.

Career Highlights

Hareesh has worked with prominent companies in the industry, including Air Products and Chemicals, Inc. and Applied Materials, Inc. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.

Collaborations

Throughout his career, Hareesh has collaborated with talented individuals such as Manchao Xiao and Xinjian Lei. These partnerships have fostered a creative environment that has led to groundbreaking advancements in his field.

Conclusion

Hareesh Thridandam's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His innovative methods continue to impact the industry positively.