The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Aug. 07, 2003
Robert P. Mandal, Saratoga, CA (US);
Alexandros T. Demos, Fremont, CA (US);
Timothy Weidman, Sunnyvale, CA (US);
Michael P. Nault, San Jose, CA (US);
Nikolaos Bekiaris, San Jose, CA (US);
Scott Jeffrey Weigel, Allentown, PA (US);
Lee A. Senecal, Vista, CA (US);
James E. Mac Dougall, New Tripoli, PA (US);
Hareesh Thridandam, Vista, CA (US);
Robert P. Mandal, Saratoga, CA (US);
Alexandros T. Demos, Fremont, CA (US);
Timothy Weidman, Sunnyvale, CA (US);
Michael P. Nault, San Jose, CA (US);
Nikolaos Bekiaris, San Jose, CA (US);
Scott Jeffrey Weigel, Allentown, PA (US);
Lee A. Senecal, Vista, CA (US);
James E. Mac Dougall, New Tripoli, PA (US);
Hareesh Thridandam, Vista, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A process for depositing porous silicon oxide-based films using a sol-gel approach utilizing a precursor solution formulation which includes a purified nonionic surfactant and an additive among other components, where the additive is either an ionic additive or an amine additive which forms an ionic ammonium type salt in the acidic precursor solution. Using this precursor solution formulation enables formation of a film having a dielectric constant less than 2.5, appropriate mechanical properties, and minimal levels of alkali metal impurities. In one embodiment, this is achieved by purifying the surfactant and adding ionic or amine additives such as tetraalkylammonium salts and amines to the stock precursor solution.