The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2006
Filed:
Feb. 04, 2005
Xinjian Lei, Vista, CA (US);
Manchao Xiao, San Diego, CA (US);
Hareesh Thridandam, Vista, CA (US);
Kirk Scott Cuthill, Vista, CA (US);
Xinjian Lei, Vista, CA (US);
Manchao Xiao, San Diego, CA (US);
Hareesh Thridandam, Vista, CA (US);
Kirk Scott Cuthill, Vista, CA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
This invention is related to organometallic precursors and deposition processes for fabricating conformal metal containing films on substrates such as silicon, metal nitrides and other metal layers. The organometallic precursors are N,N'-alkyl-1,1-alkylsilylamino metal complexes represented by the formula: wherein M is a metal selected from Group VIIb, VIII, IX and X, and specific examples include cobalt, iron, nickel, manganese, ruthenium, zinc, copper, palladium, platinum, iridium, rhenium, osmium, and the Rcan be same or different selected from hydrogen, alkyl, alkoxy, fluoroalkyl and alkoxy, cycloaliphatic, and aryl.