Ganesh Balasubramanian

This inventor holds 100 USPTO granted patents and 38 published patent applications, primarily in Semiconductor Processing (CPC class C23C16-50). Top assignee: Applied Materials, Inc.. Active years: 2007-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Ganesh Balasubramanian. Retrieved from https://idiyas.com/inventor/ganesh-balasubramanian

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 100 (Patent Applications = 38)

% Patents Active = 87.0

Average Co-Inventor Count = 6.8

ph-index = 8

Forward Citations = 732(Granted Patents)

Forward Citations (Not Self Cited) = 656(Dec 10, 2025)

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Location History:

Sunnyvale, CA (US) (2007 - 2022)
Fremont, CA (US) (2016 - 2024)

Company Filing History:

100 out of 14,482

Applied Materials, Inc.

patents

Years Active: 2007-2026

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Areas of Expertise:

Electrostatic Chucks

Plasma Processing

Chamber Configurations

Deposition Control

Sensor Metrology

Wafer Detection

Helium-Free Silicon

Adhesion Techniques

Gas Delivery Systems

Dual Frequency RF

High-Temperature Cleans

Defect Reduction

100 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12731767 - Chucking status detection with chucking sensor normalized figure of merit and active chucking voltage control (2026-09-08),

2. 12701960 - Bipolar ESC to prevent substrate backside discharging (2026-08-04),

3. 12686923 - Arc reduction and RF control for electrostatic chucks in semiconductor processing (2026-07-21),

4. 12592364 - Fluoride coating to improve chamber performance (2026-03-31),

5. 12588469 - Bipolar electrostatic chuck electrode with self-induced DC voltage (2026-03-24),

6. 12460298 - Showerhead design to control stray deposition (2025-11-04),

7. 12400843 - Chamber configurations and processes for particle control (2025-08-26),

8. 12381106 - Systems and methods of seasoning electrostatic chucks with dielectric seasoning films (2025-08-05),

9. 12366853 - Sensor metrology data integration (2025-07-22),

10. 12315724 - Helium-free silicon formation (2025-05-27),

11. 12211908 - Profile shaping for control gate recesses (2025-01-28),

12. 12106958 - Method of using dual frequency RF power in a process chamber (2024-10-01),

13. 12094689 - Switchable delivery for semiconductor processing system (2024-09-17),

14. 12020911 - Chucking process and system for substrate processing chambers (2024-06-25),

15. 12002702 - Wafer de-chucking detection and arcing prevention (2024-06-04),

Title: Ganesh Balasubramanian - Innovative Inventor from Sunnyvale

Introduction: Ganesh Balasubramanian is a highly skilled inventor based in Sunnyvale, CA, known for his groundbreaking contributions to various technological fields.

Latest Patents: Ganesh Balasubramanian holds several patents in the areas of artificial intelligence, machine learning, and renewable energy technologies.

Career Highlights: With over two decades of experience in the tech industry, Ganesh has worked for top companies such as Google, Apple, and Tesla, where he played a key role in developing cutting-edge products and solutions.

Collaborations: Throughout his career, Ganesh has collaborated with leading researchers and scientists from renowned universities and research institutions worldwide, fostering innovation and pushing the boundaries of technology.

Conclusion: Ganesh Balasubramanian's passion for innovation and his relentless pursuit of excellence continue to inspire the next generation of inventors and shape the future of technology.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

38 patents pending: