The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Apr. 17, 2025
Applied Materials, Inc., Santa Clara, CA (US);
Yu Jin, Santa Clara, CA (US);
Edward P. Hammond, IV, Hillsborough, CA (US);
Thomas Rubio, Santa Clara, CA (US);
Martin Jay Seamons, San Jose, CA (US);
Ganesh Balasubramanian, Fremont, CA (US);
Alexander Garachtchenko, Santa Clara, CA (US);
Abhijit Kangude, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method for monitoring a chucking status of a substrate, including: supplying chucking voltage to an electrostatic chuck disposed in a substrate pedestal, wherein a substrate is supported by the substrate pedestal, sending a signal to an electrode of an electrostatic chuck at a frequency range, measuring an impedance of the signal, comparing the measured impedance to a baseline impedance value to obtain a chucking status value, and determining a chucking status of the substrate based on the chucking status value, wherein the chucking status comprises not-chucked, under-chucked, fully-chucked, or over-chucked.