The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2026
Filed:
Aug. 03, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Jennifer Y. Sun, Fremont, CA (US);
Ren-Guan Duan, Fremont, CA (US);
Gayatri Natu, Mumbai, IN;
Tae Won Kim, San Jose, CA (US);
Jiyong Huang, Rockwall, TX (US);
Nitin Deepak, Mumbai, IN;
Paul Brillhart, Pleasanton, CA (US);
Lin Zhang, San Jose, CA (US);
Yikai Chen, San Jose, CA (US);
Sanni Sinikka Seppälä, Santa Clara, CA (US);
Ganesh Balasubramanian, Fremont, CA (US);
Juancarlos Rocha, Fremont, CA (US);
Shankar Venkataraman, San Jose, CA (US);
Katherine Elizabeth Woo, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the disclosure relate to articles, coated chamber components and methods of coating chamber components with a protective coating that includes at least one metal fluoride having a formula selected from the group consisting of M1F, M1M2Fand M1M2M3F, where at least one of M1, M2, or M3 is magnesium or lanthanum. The protective coating can be deposited by atomic layer deposition, chemical vapor deposition, electron beam ion assisted deposition, or physical vapor deposition.