Katherine Woo

Title: Katherine Woo: Innovator in Semiconductor Technology

Introduction

Katherine Woo is a prominent inventor based in Santa Clara, CA. She has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. Her work focuses on enhancing the efficiency and functionality of semiconductor processing systems.

Latest Patents

Katherine's latest patents include innovative designs for semiconductor substrate support power transmission components. These exemplary support assemblies feature an electrostatic chuck body that defines a substrate support surface. The assemblies incorporate a support stem coupled with the electrostatic chuck body, a heater embedded within the chuck body, and an electrode positioned between the heater and the substrate support surface. Additionally, a power transmission rod, made from a material characterized by a coefficient of thermal expansion of less than or about 10×10/° C, is included.

Another notable patent is the semiconductor substrate support leveling apparatus. This invention is designed for semiconductor processing systems and includes a chamber body with sidewalls and a base that defines an interior volume. The substrate support extends through the base of the chamber body and is configured to support a substrate within the interior volume. A faceplate with a plurality of apertures is positioned within the chamber, and a leveling apparatus, which includes multiple piezoelectric pressure sensors, is seated on the substrate support.

Career Highlights

Katherine Woo is currently employed at Applied Materials, Inc., where she continues to push the boundaries of semiconductor technology. Her innovative work has positioned her as a key player in the industry, contributing to advancements that enhance semiconductor processing capabilities.

Collaborations

Throughout her career, Katherine has collaborated with talented individuals such as Jian Li and Paul Brillhart. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Katherine Woo's contributions to semiconductor technology through her patents and collaborations highlight her role as a leading inventor in the field. Her work not only advances the industry but also sets the stage for future innovations in semiconductor processing systems.