Lauchheim, Germany

Eugen Foca

USPTO Granted Patents = 12 

Average Co-Inventor Count = 3.7

ph-index = 1

Forward Citations = 4(Granted Patents)


Location History:

  • Lauchheim, DE (2018 - 2020)
  • Ellwangen, DE (2020 - 2024)

Company Filing History:


Years Active: 2018-2025

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12 patents (USPTO):Explore Patents

Title: Innovations of Inventor Eugen Foca

Introduction

Eugen Foca is a prominent inventor based in Lauchheim, Germany. He has made significant contributions to the field of charged particle beam systems and semiconductor structures. With a total of 12 patents to his name, Foca continues to push the boundaries of technology and innovation.

Latest Patents

Foca's latest patents include a charged particle beam system and methods for operating such systems. The charged particle beam system is designed to deflect a charged particle beam based on a sum of analog signals generated from separate digital to analog conversions. This innovative approach allows for the scanning of multiple regions of interest by varying only one digital signal while keeping the other constant. Additionally, he has developed methods for recording images of these regions with reduced interference due to charge accumulation. Another notable patent involves parameterizing x-ray scattering measurements using slice-and-image tomographic imaging of semiconductor structures, which can be utilized for in-line quality checks in wafer metrology.

Career Highlights

Eugen Foca is currently employed at Carl Zeiss SMT GmbH, a company renowned for its advancements in optical and electron beam technologies. His work at this esteemed organization has allowed him to develop cutting-edge technologies that have a significant impact on various industries.

Collaborations

Foca has collaborated with notable colleagues such as Thomas Korb and Amir Avishai. These partnerships have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.

Conclusion

Eugen Foca's contributions to the field of charged particle beam systems and semiconductor structures exemplify his dedication to innovation. His patents reflect a deep understanding of complex technologies and a commitment to advancing the industry.

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