The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Mar. 03, 2020
Applicants:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Carl Zeiss Smt Inc., Pleasanton, CA (US);
Inventors:
Abhilash Srikantha, Neu-Ulm, DE;
Christian Wojek, Aalen, DE;
Keumsil Lee, Palo Alto, CA (US);
Thomas Korb, Schwaebisch Gmuend, DE;
Jens Timo Neumann, Aalen, DE;
Eugen Foca, Ellwangen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06N 20/00 (2019.01); G06N 5/04 (2006.01); G06K 9/00 (2022.01); G06V 10/82 (2022.01); G06K 9/62 (2022.01); G01N 23/06 (2018.01); G01N 23/046 (2018.01); G01N 23/22 (2018.01); G01N 21/65 (2006.01); G06N 3/04 (2006.01); G06N 3/08 (2006.01);
U.S. Cl.
CPC ...
G06N 5/04 (2013.01); G06K 9/00536 (2013.01); G06K 9/6217 (2013.01); G06N 20/00 (2019.01); G06V 10/82 (2022.01); G01N 21/65 (2013.01); G01N 23/046 (2013.01); G01N 23/06 (2013.01); G01N 23/22 (2013.01); G01N 2223/03 (2013.01); G01N 2223/045 (2013.01); G01N 2223/07 (2013.01); G01N 2223/418 (2013.01); G01N 2223/419 (2013.01); G06K 9/6254 (2013.01); G06K 9/6256 (2013.01); G06N 3/0454 (2013.01); G06N 3/08 (2013.01); G06V 2201/06 (2022.01);
Abstract
Methods for determining metrology sites for products includes detecting corresponding objects in measurement data of one or more product samples, and aligning the detected objects are aligned. The methods also include analyzing the aligned objects, and determining metrology sites based on the analysis. Devices use such methods to determine metrology sites for products.