logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12288706 B1

PDFFull Text
Date of Patent:
Apr. 29, 2025

Filed:

Apr. 26, 2022

Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures

Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Hans Michael Stiepan, Aalen, DE;

Thomas Korb, Schwaebisch Gmuend, DE;

Eugen Foca, Ellwangen, DE;

Alex Buxbaum, San Ramon, CA (US);

Dmitry Klochkov, Schwaebisch Gmuend, DE;

Jens Timo Neumann, Aalen, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:

Fish & Richardson P.C.

Primary Examiner:

Darryl V Dottin

Int. Cl.
CPC ...
H01L 21/67 (2005.12); G01N 23/046 (2017.12); G01N 23/083 (2017.12); G01N 23/20 (2017.12); G06T 7/00 (2016.12);
U.S. Cl.
CPC ...
H01L 21/67288 (2012.12); G01N 23/046 (2012.12); G01N 23/083 (2012.12); G01N 23/20083 (2012.12); G06T 7/0006 (2012.12); G06T 7/001 (2012.12); G01N 2223/04 (2012.12); G01N 2223/045 (2012.12); G01N 2223/401 (2012.12); G01N 2223/6116 (2012.12); G06T 2207/10081 (2012.12); G06T 2207/30148 (2012.12);
Abstract

Semiconductor structures can be investigated, e.g., in an in-line quality check. An x-ray scattering measurement, e.g., CD-SAXS, can be used for wafer metrology. The x-ray scattering measurement can be configured based on a slice-and-imaging tomographic measurement using a dual-beam device, e.g., including a focused ion beam device and a scanning electron microscope.

Find Patent Forward Citations

Stiepan, Hans. (2025). Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures (U.S. Patent No. 12288706). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12288706

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…