Company Filing History:
Years Active: 2023-2025
Title: The Innovative Contributions of Alex Buxbaum
Introduction
Alex Buxbaum is a notable inventor based in San Ramon, CA. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on enhancing measurement techniques that are crucial for the quality control of semiconductor structures.
Latest Patents
One of his latest patents is titled "Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures." This innovation allows for the investigation of semiconductor structures, particularly in an in-line quality check. The x-ray scattering measurement, such as CD-SAXS, can be configured based on a slice-and-imaging tomographic measurement using a dual-beam device, which includes a focused ion beam device and a scanning electron microscope.
Another significant patent is "FIB-SEM 3D tomography for measuring shape deviations of HAR structures." This 3D tomographic inspection method is designed for the inspection of semiconductor features within an inspection volume of a semiconductor wafer. It involves obtaining a 3D tomographic image and selecting multiple 2D cross-section images. The method identifies contours of high aspect ratio (HAR) structures and extracts deviation parameters that describe fabrication errors, such as displacement and deviations in radius or diameter.
Career Highlights
Alex Buxbaum is currently employed at Carl Zeiss SMT GmbH, where he continues to push the boundaries of semiconductor technology. His innovative approaches have made a significant impact on the industry, particularly in the realm of wafer metrology.
Collaborations
Throughout his career, Alex has collaborated with talented individuals such as Dmitry Klochkov and Thomas Korb. These collaborations have further enriched his work and contributed to the advancement of semiconductor measurement techniques.
Conclusion
In summary, Alex Buxbaum is a distinguished inventor whose work in semiconductor technology has led to valuable innovations. His patents reflect a commitment to improving measurement techniques that are essential for quality control in the semiconductor industry.