The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2023
Filed:
Nov. 09, 2021
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Dmitry Klochkov, Schwaebisch Gmuend, DE;
Chuong Huynh, Quincy, MA (US);
Thomas Korb, Schwaebisch Gmuend, DE;
Alex Buxbaum, San Ramon, CA (US);
Amir Avishai, Pleasanton, CA (US);
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The present invention relates to a method for measuring a sample with a microscope, the method comprising scanning the sample using a focusing plane having a first angle with respect to a top surface of the sample and computing a confidence distance based on the first angle. The method further comprises selecting at least one among a plurality of alignment markers on the sample for performing a lateral alignment of the scanning step and/or for performing a lateral alignment of an output of the scanning step. In particular, the at least one alignment marker selected at the selecting step is chosen among the alignment markers placed within the confidence distance from an intersection of the focusing plane with the top surface.