The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2024
Filed:
Oct. 14, 2021
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Eugen Foca, Ellwangen, DE;
Amir Avishai, Pleasanton, CA (US);
Dmitry Klochkov, Schwaebisch Gmuend, DE;
Thomas Korb, Schwaebisch Gmuend, DE;
Jens Timo Neumann, Aalen, DE;
Keumsil Lee, Palo Alto, CA (US);
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/24 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/24 (2013.01); H01J 37/28 (2013.01);
Abstract
The present invention relates to a method for measuring a sample with a microscope, the method comprising the steps of: measuring a tilt of the sample, correcting an orientation of the sample based on the tilt, and scanning the sample.