Sunnyvale, CA, United States of America

Ellie Y Yieh

This inventor holds 183 USPTO granted patents and 50 published patent applications and 5 EPO patents, primarily in Semiconductor Manufacturing (CPC class H01L2-131). Top assignees: Applied Materials, Inc., Micro Materials Inc., University of California. Active years: 1994-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Ellie Y Yieh. Retrieved from https://idiyas.com/inventor/ellie-y-yieh

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 183 

% Patents Active = 74.3

 

Average Co-Inventor Count = 4.5

ph-index = 39

Forward Citations = 10,426(Granted Patents)

Forward Citations (Not Self Cited) = 10,038(Dec 10, 2025)


Inventors with similar research interests:

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Location History:

  • Milbrae, CA (US) (2001 - 2003)
  • Santa Clara, CA (US) (2002 - 2003)
  • Millbrae, CA (US) (1994 - 2009)
  • Sunnyvale, CA (US) (2019 - 2023)
  • San Jose, CA (US) (2001 - 2024)

Company Filing History:


Years Active: 1994-2026

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Areas of Expertise:
Dielectric Deposition
Semiconductor Wafers
Photoresist Patterning
High Pressure Processing
Carbon Compound Films
3D DRAM Stacking
Graphene Deposition
Vertical Transistor Fabrication
Ion Beam Etching
Additive Patterning
Film Quality Improvement
Substrate Processing
183 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Ellie Yieh - Pioneering Patents in Semiconductor Technology

Introduction:

In the world of semiconductor technology, certain brilliant minds inspire awe with their groundbreaking inventions and contributions to the field. One such individual is Ellie Yieh, hailing from San Jose, CA, whose numerous patents and expertise have helped drive the industry forward. Join us as we delve into Mr. Yieh's latest patents, career highlights, collaborations, and the impact of his work.

Latest Patents:

Ellie Yieh's inventive prowess is evident through his impressive collection of 152 patents. One notable patent is the "Film Structure for Electric Field Guided Photoresist Patterning Process," which addresses the critical challenge of minimizing line edge/width roughness in photolithography. The patent presents a method that involves altering the movement of photoacid generated from a photoacid generator using an electric or magnetic field, thereby enhancing the patterning process and reducing imperfections.

Another noteworthy patent is the "Silicon Carbonitride Gapfill with Tunable Carbon Content," which outlines methods for plasma-enhanced chemical vapor deposition (PECVD) of silicon carbonitride films. This invention allows the creation of flowable silicon carbonitride films on substrate surfaces, enabling efficient gap filling and precise control over carbon content. Such innovations contribute immensely to the development of advanced semiconductor devices.

Career Highlights:

Ellie Yieh's professional journey has been closely associated with renowned companies in the semiconductor industry. Notably, he has had the privilege of working at Applied Materials, Inc., a global leader in materials engineering solutions for semiconductor and display industries. Yieh's invaluable contributions to Applied Materials, Inc., have catapulted the company's technological advancements, cementing its position as an industry frontrunner.

Collaborations:

Throughout his career, Ellie Yieh has had the opportunity to collaborate with esteemed colleagues, further enriching his contributions to the field of semiconductor technology. Notable collaborations include working alongside Srinivas Nemani and Li-Qun Xia. By joining forces with other experts, Yieh has been able to leverage diverse knowledge and expertise, leading to innovative solutions and novel approaches in the industry.

Conclusion:

Ellie Yieh's ingenious patents and career accomplishments make him a trailblazer in the realm of semiconductor technology. His groundbreaking inventions, including the film structure for electric field guided photoresist patterning process and silicon carbonitride gapfill with tunable carbon content, have revolutionized the semiconductor manufacturing process. With a remarkable number of patents to his name, Yieh continually pushes the boundaries of innovation, driving progress in the semiconductor industry. We eagerly await his future contributions, which are sure to shape the future of technology.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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