IDiyas

For the Inventor, By the Inventor

Saratoga, CA, United States of America

Dan Katz

USPTO Granted Patents = 25

Average Co-Inventor Count = 6.2

ph-index = 12

Forward Citations = 571(Granted Patents)


Location History:

  • Agoura Hills, CA (US) (2001 - 2007)
  • San Jose, CA (US) (2011 - 2013)
  • Saratoga, CA (US) (2007 - 2019)

Company Filing History:

goldMedal24 out of 13,684 
 
Applied Materials, Inc.
 patents
silverMedal1 out of 3 
 
Appiled Materials, Inc.
 patents

Years Active: 2001-2019

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25 patents (USPTO):
1. 10257887 - Substrate support assembly (2019-04-09),
2. 9883549 - Substrate support assembly having rapid temperature control (2018-01-30),
3. 9275887 - Substrate processing with rapid temperature gradient control (2016-03-01),
4. 8607731 - Cathode with inner and outer electrodes at different heights (2013-12-17),
5. 8383002 - Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection (2013-02-26),
6. 8236133 - Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias (2012-08-07),
7. 8066895 - Method to control uniformity using tri-zone showerhead (2011-11-29),
8. 8017526 - Gate profile control through effective frequency of dual HF/VHF sources in a plasma etch process (2011-09-13),
9. 7879250 - Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection (2011-02-01),
10. 7832354 - Cathode liner with wafer edge gas injection in a plasma reactor chamber (2010-11-16),
11. 7780864 - Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution (2010-08-24),
12. 7727413 - Dual plasma source process using a variable frequency capacitively coupled source to control plasma ion density (2010-06-01),
13. 7674394 - Plasma process for inductively coupling power through a gas distribution plate while adjusting plasma distribution (2010-03-09),
14. 7645357 - Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency (2010-01-12),
15. 7436645 - Method and apparatus for controlling temperature of a substrate (2008-10-14),

Title: The Innovative Contributions of Dan Katz in Substrate Support Assemblies

Introduction

Dan Katz is a prominent inventor based in Saratoga, California, who has made significant strides in the field of substrate support assemblies. With a remarkable portfolio of 25 patents, Katz continues to push the boundaries of innovation in technology and engineering.

Latest Patents

Among his latest contributions are two notable patents that enhance the functionality and efficiency of substrate support assemblies. The first patent describes a substrate support assembly that features a ceramic puck with a substrate receiving surface. This design includes an embedded electrode, which generates an electrostatic force to retain the substrate securely in place. Additionally, it incorporates a heater composed of multiple spaced-apart heater coils, allowing for effective heating of the substrate. A compliant layer made of silicon material bonds the ceramic puck to a base, which is designed with a fluid circulation channel that improves thermal management.

The second patent focuses on a rapid temperature control system within a substrate support assembly. This innovation utilizes a ceramic puck with an embedded electrode and heating coils, which are radially spaced. The base includes a unique channel that loops back on itself, facilitating fluid circulation for efficient heating. This design also incorporates a compliant layer that connects the ceramic puck to the base, ensuring structural integrity during operation.

Career Highlights

Throughout his career, Dan Katz has worked with esteemed companies that have allowed him to contribute to groundbreaking innovations. Notably, he has been associated with Applied Materials, Inc., where he further developed his expertise in substrate technology and assembly systems.

Collaborations

Katz has collaborated with other talented professionals in his field, including Alexander Miller Paterson and Valentin Nikolov Todorow. These partnerships have likely propelled various projects to success, as they combined their diverse skills and knowledge to create advanced technological solutions.

Conclusion

Dan Katz's work exemplifies the spirit of innovation and creativity that drives the advancement of technology in substrate support assemblies. His latest patents demonstrate a deep understanding of thermal management and structural design, which are crucial in enhancing the performance of these systems. As he continues to develop his ideas, the impact of his contributions will undoubtedly resonate throughout the industry.

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