The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2010
Filed:
Sep. 05, 2007
Applicants:
Dan Katz, Saratoga, CA (US);
David Palagashvili, Mountain View, CA (US);
Michael D. Willwerth, Campbell, CA (US);
Valentin N. Todorow, Palo Alto, CA (US);
Alexander M. Paterson, San Jose, CA (US);
Inventors:
Dan Katz, Saratoga, CA (US);
David Palagashvili, Mountain View, CA (US);
Michael D. Willwerth, Campbell, CA (US);
Valentin N. Todorow, Palo Alto, CA (US);
Alexander M. Paterson, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The disclosure concerns a wafer support for use in a plasma reactor chamber, in which the wafer support has a wafer edge gas injector adjacent and surrounding the wafer edge.