The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2013
Filed:
Nov. 24, 2010
Applicants:
Dan Katz, Saratoga, CA (US);
David Palagashvili, Mountain View, CA (US);
Michael D. Willwerth, Campbell, CA (US);
Valentin N. Todorow, Palo Alto, CA (US);
Alexander M. Paterson, San Jose, CA (US);
Inventors:
Dan Katz, Saratoga, CA (US);
David Palagashvili, Mountain View, CA (US);
Michael D. Willwerth, Campbell, CA (US);
Valentin N. Todorow, Palo Alto, CA (US);
Alexander M. Paterson, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The disclosure concerns a method of processing a workpiece or in a plasma reactor chamber, using independent gas injection at the wafer edge.