The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Jun. 20, 2008
Dan Katz, San Jose, CA (US);
David Palagashvili, Mountain View, CA (US);
Brian K. Hatcher, San Jose, CA (US);
Theodoros Panagopoulos, San Jose, CA (US);
Valentin N. Todorow, Palo Alto, CA (US);
Edward P. Hammond, Iv, Hillsborough, CA (US);
Alexander M. Paterson, San Jose, CA (US);
Rodolfo P. Belen, San Francisco, CA (US);
Dan Katz, San Jose, CA (US);
David Palagashvili, Mountain View, CA (US);
Brian K. Hatcher, San Jose, CA (US);
Theodoros Panagopoulos, San Jose, CA (US);
Valentin N. Todorow, Palo Alto, CA (US);
Edward P. Hammond, IV, Hillsborough, CA (US);
Alexander M. Paterson, San Jose, CA (US);
Rodolfo P. Belen, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A gas distribution assembly for the ceiling of a plasma reactor includes a center fed hub and an equal path length distribution gas manifold underlying the center fed hub.