This inventor holds 5 USPTO granted patents and 1 EPO patent. Top assignees: Applied Materials, Inc., Headway Technologies, Incorporated, Magic Technologies, Inc.. Active years: 2011-2014.
Location History:
- San Jose, CA (US) (2011)
- San Francisco, CA (US) (2011 - 2014)
Company Filing History:
3 out of 14,403 
1 out of 1,228 
1 out of 118 Years Active: 2011-2014
Title: The Innovations of Rodolfo Belen
Introduction
Rodolfo Belen is a notable inventor based in San Francisco, CA. He has made significant contributions to the field of technology, particularly in the development of advanced materials and processes for microelectronics. With a total of 5 patents to his name, Belen's work has had a substantial impact on the industry.
Latest Patents
One of Belen's latest patents is titled "Composite hard mask with upper sacrificial dielectric layer for the patterning and etching of nanometer size MRAM devices." This invention discloses a composite hard mask that prevents the buildup of metal etch residue in MRAM devices during etch processes that define an MTJ shape. As a result, the integrity of the MTJ shape is substantially improved. The hard mask consists of a lower non-magnetic spacer, a middle conductive layer, and an upper sacrificial dielectric layer. The non-magnetic spacer serves as an etch stop during a pattern transfer with fluorocarbon plasma through the conductive layer. A photoresist pattern is transferred through the dielectric layer with a first fluorocarbon etch. After the photoresist is removed, a second fluorocarbon etch transfers the pattern through the conductive layer. The dielectric layer protects the top surface of the conductive layer during the second fluorocarbon etch and during a substantial portion of a third RIE step with a gas comprised of C, H, and O that transfers the pattern through the underlying MTJ layers.
Another significant patent is "Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias." This invention features a gas distribution assembly for the ceiling of a plasma reactor, which includes a center-fed hub and an equal path length distribution gas manifold underlying the center-fed hub.
Career Highlights
Throughout his career, Rodolfo Belen has worked with prominent companies such as Applied Materials, Inc. and Magic Technologies, Inc. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking innovations in the field.
Collaborations
Belen has collaborated with notable colleagues, including Edward P Hammond and Brian K Hatcher. These partnerships have fostered an environment of creativity and innovation, leading to the development of advanced technologies.
Conclusion
Rodolfo Belen's contributions to the field of