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For the Inventor, By the Inventor

San Jose, CA, United States of America

Theodoros Panagopoulos

This inventor holds 19 USPTO granted patents and 1 published patent application, primarily in Plasma Processing Technology. Top assignee: Applied Materials, Inc.. Active years: 2005-2019.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Theodoros Panagopoulos. Retrieved from https://idiyas.com/inventor/theodoros-panagopoulos

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 19 

% Patents Active = 42.1

Average Co-Inventor Count = 5.0

ph-index = 11

Forward Citations = 343(Granted Patents)


Location History:

  • Santa Clara, CA (US) (2008)
  • Cupertino, CA (US) (2005 - 2011)
  • San Jose, CA (US) (2007 - 2019)

Company Filing History:

goldMedal19 out of 14,482 
 
Applied Materials, Inc.
 patents

Years Active: 2005-2019

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Areas of Expertise:
Substrate Support Assembly
Rapid Temperature Control
Electrostatic Chuck
Plasma Reactor
Temperature Gradient Control
Dual Plasma Source
Capacitively Coupled Plasma
Inductively Coupled Plasma
Process Control
Plasma Ion Density
Etching Process
Gas Distribution
19 patents (USPTO):Explore Patents
1. 10257887 - Substrate support assembly (2019-04-09),
2. 9883549 - Substrate support assembly having rapid temperature control (2018-01-30),
3. 9275887 - Substrate processing with rapid temperature gradient control (2016-03-01),
4. 8663391 - Electrostatic chuck having a plurality of heater coils (2014-03-04),
5. 8236133 - Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias (2012-08-07),
6. 8226769 - Substrate support with electrostatic chuck having dual temperature zones (2012-07-24),
7. 8075729 - Method and apparatus for controlling temperature of a substrate (2011-12-13),
8. 7838430 - Plasma control using dual cathode frequency mixing (2010-11-23),
9. 7780864 - Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution (2010-08-24),
10. 7727413 - Dual plasma source process using a variable frequency capacitively coupled source to control plasma ion density (2010-06-01),
11. 7674394 - Plasma process for inductively coupling power through a gas distribution plate while adjusting plasma distribution (2010-03-09),
12. 7648914 - Method for etching having a controlled distribution of process results (2010-01-19),
13. 7645357 - Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency (2010-01-12),
14. 7544251 - Method and apparatus for controlling temperature of a substrate (2009-06-09),
15. 7510665 - Plasma generation and control using dual frequency RF signals (2009-03-31),

Title: Theodoros Panagopoulos: Innovator in Substrate Support Assembly Technology

Introduction

Theodoros Panagopoulos, located in San Jose, CA, is a distinguished inventor with a remarkable portfolio of 19 patents. His work primarily focuses on innovations in substrate support assemblies, contributing significantly to advancements in semiconductor manufacturing technologies.

Latest Patents

Among his latest inventions, Panagopoulos has developed a unique substrate support assembly which features a ceramic puck designed with a substrate receiving surface. This assembly includes an embedded electrode that generates an electrostatic force to securely retain substrates during processing, along with a heater that incorporates multiple spaced apart heater coils. Additionally, he has patented a substrate support assembly with rapid temperature control. This innovation includes a ceramic puck with an electrode and a heater formed from radially spaced coils, situated within a base that features a fluid circulation channel designed for efficient thermal management.

Career Highlights

Theodoros Panagopoulos is affiliated with Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials emphasizes his commitment to enhancing production methods and improving product performance in the manufacturing of electronic devices.

Collaborations

Throughout his career, Panagopoulos has collaborated with notable colleagues such as John Patrick Holland and Alexander Matyushkin. These partnerships have certainly enriched his contributions to the field, fostering a collaborative environment for innovation and excellence.

Conclusion

Theodoros Panagopoulos exemplifies the spirit of innovation in the technology sector with his impactful inventions and professional collaborations. His contributions to substrate support assembly technologies not only demonstrate his expertise but also significantly influence the advancement of semiconductor manufacturing processes.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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