San Jose, CA, United States of America

Theodoros Panagopoulos

USPTO Granted Patents = 19 

Average Co-Inventor Count = 5.0

ph-index = 11

Forward Citations = 325(Granted Patents)


Location History:

  • Santa Clara, CA (US) (2008)
  • Cupertino, CA (US) (2005 - 2011)
  • San Jose, CA (US) (2007 - 2019)

Company Filing History:


Years Active: 2005-2019

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19 patents (USPTO):Explore Patents

Title: Theodoros Panagopoulos: Innovator in Substrate Support Assembly Technology

Introduction

Theodoros Panagopoulos, located in San Jose, CA, is a distinguished inventor with a remarkable portfolio of 19 patents. His work primarily focuses on innovations in substrate support assemblies, contributing significantly to advancements in semiconductor manufacturing technologies.

Latest Patents

Among his latest inventions, Panagopoulos has developed a unique substrate support assembly which features a ceramic puck designed with a substrate receiving surface. This assembly includes an embedded electrode that generates an electrostatic force to securely retain substrates during processing, along with a heater that incorporates multiple spaced apart heater coils. Additionally, he has patented a substrate support assembly with rapid temperature control. This innovation includes a ceramic puck with an electrode and a heater formed from radially spaced coils, situated within a base that features a fluid circulation channel designed for efficient thermal management.

Career Highlights

Theodoros Panagopoulos is affiliated with Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials emphasizes his commitment to enhancing production methods and improving product performance in the manufacturing of electronic devices.

Collaborations

Throughout his career, Panagopoulos has collaborated with notable colleagues such as John Patrick Holland and Alexander Matyushkin. These partnerships have certainly enriched his contributions to the field, fostering a collaborative environment for innovation and excellence.

Conclusion

Theodoros Panagopoulos exemplifies the spirit of innovation in the technology sector with his impactful inventions and professional collaborations. His contributions to substrate support assembly technologies not only demonstrate his expertise but also significantly influence the advancement of semiconductor manufacturing processes.

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