Yokohama, Japan

Akikazu Tanimoto

This inventor holds 53 USPTO granted patents and 4 published patent applications, primarily in Exposure Technology (CPC class 355 ). Top assignees: Nikon Corporation, Nippon Kogaku K.k.. Active years: 1978-2018.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Akikazu Tanimoto. Retrieved from https://idiyas.com/inventor/akikazu-tanimoto

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 53 

% Patents Active = 79.2

Average Co-Inventor Count = 2.3

ph-index = 24

Forward Citations = 1,731(Granted Patents)

Forward Citations (Not Self Cited) = 1,688(Dec 10, 2025)


Inventors with similar research interests:


Location History:

  • Kawasaki, JP (1978 - 1986)
  • Kanagawa, JP (1997)
  • Kanagawa-ken, JP (1997 - 1999)
  • Yokohama, JP (1986 - 2018)

Company Filing History:


Years Active: 1978-2018

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Areas of Expertise:
Exposure Apparatus
Light Exposure
Projection Optical
Alignment Method
Laser Processing
Interferometric Devices
Thin Film Removal
Environmental Control
Position Measurement
Calibration Standard
Pattern Exposure
Scanning Systems
53 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Akikazu Tanimoto from Yokohama, JP

Introduction: Akikazu Tanimoto, a prolific inventor based in Yokohama, JP, has made significant contributions to the field of optical technology with an impressive portfolio of 53 patents. His groundbreaking work in the development of exposure apparatus and methods for producing devices has garnered recognition worldwide.

Latest Patents: Tanimoto's recent patents showcase his expertise in liquid immersion exposure techniques. His inventions include exposure apparatus and methods that utilize a projection system, a stage system with a substrate holder, a supply port for liquid, and a recovery port for collecting the liquid. These innovations significantly improve the precision and efficiency of the exposure process.

Career Highlights: Tanimoto has held key positions at reputable companies such as Nikon Corporation and Nippon Kogaku K.K., where he has honed his skills and expertise in optical technology. His innovative approach to problem-solving and his ability to push the boundaries of conventional methods have established him as a leading figure in the industry.

Collaborations: Throughout his career, Tanimoto has collaborated with esteemed colleagues such as Naoyuki Kobayashi and Yasushi Mizuno. Together, they have worked on cutting-edge projects that have led to groundbreaking advancements in the field of optical technology. Tanimoto's collaborative spirit and dedication to innovation have been instrumental in his success.

Conclusion: Akikazu Tanimoto's relentless pursuit of excellence and his passion for innovation have solidified his reputation as a visionary inventor in the field of optical technology. His pioneering work in exposure apparatus and methods continues to shape the future of the industry, inspiring others to push the boundaries of what is possible.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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