The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2004
Filed:
Dec. 20, 2002
Applicant:
Inventor:
Akikazu Tanimoto, Yokohama, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/752 ; G03B 2/742 ;
U.S. Cl.
CPC ...
G03B 2/752 ; G03B 2/742 ;
Abstract
A specified gas is supplied into a chamber where masks or reticles to be exposed are arranged. Part of the air-gas mixture within the chamber is exhausted into the atmosphere. After that, when the gas within the chamber reaches a specified concentration, part of the air-gas mixture within the chamber is circulated and an appropriate concentration of gas is supplied to the chamber.