The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Jun. 22, 2007
Naoyuki Kobayashi, Fukaya, JP;
Akikazu Tanimoto, Yokohama, JP;
Yasushi Mizuno, Saitama, JP;
Kenichi Shiraishi, Saitama, JP;
Katsushi Nakano, Kumagaya, JP;
Soichi Owa, Kumagaya, JP;
Naoyuki Kobayashi, Fukaya, JP;
Akikazu Tanimoto, Yokohama, JP;
Yasushi Mizuno, Saitama, JP;
Kenichi Shiraishi, Saitama, JP;
Katsushi Nakano, Kumagaya, JP;
Soichi Owa, Kumagaya, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A lithographic apparatus includes a substrate table which holds a substrate, a projection system which projects a patterned beam of radiation onto the substrate, the projection system having a final optical element adjacent the substrate, a liquid supply system which provides a liquid to a space between the projection system and the substrate table, and a cleaning system which cleans the substrate table.