The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
May. 21, 2014
Nikon Corporation, Tokyo, JP;
Naoyuki Kobayashi, Fukaya, JP;
Akikazu Tanimoto, Yokohama, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A liquid immersion exposure apparatus comprising: a projection system, a stage system having a holder that holds a substrate, a supply port that is arranged such that an upper surface of the substrate faces the supply port, and a recovery port that is arranged to surround the supply port and collects an immersion liquid from the upper surface of the substrate such that only a portion of the upper surface of the substrate is covered with the immersion liquid. The apparatus also comprises an alignment system which detects an alignment mark of the substrate not through the immersion liquid. The substrate held on the holder is positioned based on a detection result of the alignment system to align the substrate with an exposure light projected through the immersion liquid by the projection system.