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Forward Citations = 4

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14 inventors (with patents filed for the assignee):

Matthias Slodowski (2 out of 6 patents)

Ulrich Pohlmann (1 out of 10 patents)

Michael Heiden (1 out of 21 patents)

4. Hans-Artur Boesser (1 out of 8 patents)

5. Klaus-Dieter Adam (1 out of 8 patents)

6. Gert Weniger (1 out of 3 patents)

7. Frank Rennicke (1 out of 1 patent)

8. Christian Halm (1 out of 1 patent)

9. Joachim Wienecke (1 out of 18 patents)

10. Magdalena I Hiltawski, Legal Representative (1 out of 1 patent)

11. Frank A Hiltawski, Legal Representative (1 out of 1 patent)

12. René Schenck (1 out of 2 patents)

13. Detlef Wolter (1 out of 2 patents)

14. Kuno Backhaus (1 out of 3 patents)

7 patents: Sort by Forward Citations

1. 8154595 - Device and method for automatic detection of incorrect measurements by means of quality factors (2012-04-10),

2. 8125653 - Apparatus and method for the determination of the position of a disk-shaped object (2012-02-28),

3. 7561984 - Method for calculating a model spectrum (2009-07-14),

4. 7426024 - System for inspecting a disk-shaped object (2008-09-16),

5. 7349106 - Apparatus and method for thin-layer metrology (2008-03-25),

6. 7277190 - Measurement system with an optical measurement arrangement (2007-10-02),

7. 7084965 - Arrangement and method for inspecting unpatterned wafers (2006-08-01),

Vistec Semiconductor Systems Jena GmbH is a leading provider of electron-beam lithography systems for the semiconductor industry. The company offers high-precision tools for research and development in nanotechnology, as well as production solutions for advanced semiconductor manufacturing. With a focus on innovation and customer satisfaction, Vistec Semiconductor Systems Jena GmbH has established a strong reputation in the industry.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 9 2025

7 Patents

#43 in Jena

#4,799 in Germany

Jena, Germany

Vistec Semiconductor Systems Jena Gmbh