The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2008
Filed:
Dec. 22, 2005
Magdalena I. Hiltawski, Legal Representative, Saafeld, DE;
Frank A. Hiltawski, Legal Representative, Saafeld, DE;
René Schenck, Jena, DE;
Magdalena I. Hiltawski, legal representative, Saafeld, DE;
Frank A. Hiltawski, legal representative, Saafeld, DE;
René Schenck, Jena, DE;
Vistec Semiconductor Systems Jena GmbH, Jena, DE;
Abstract
A system for inspecting a disc-shaped substrateis disclosed. The systemis surrounded by a housing. A tablethat is movable in at least an X-direction and a Y-direction and is borne by a mounting plateis provided within the housing. The mounting plateis vibration isolated in comparison to the housing. Equally, an exhaust unitis provided beneath the mounting plateand arranged at a distance from it. The exhaust unitpossesses an openingfor air entry. The openingfor air entry is provided in the exhaust unit between an end of the mounting plateand a wall of the housing