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Garching, Germany

Suss Microtec Lithography Gmbh

USPTO Granted Patents = 62

% Expired Patents = 27.4

EPO Patents = 18

Forward Citations = 201

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63 inventors (with patents filed for the assignee):

Gregory George (26 out of 29 patents)

Hale Johnson (14 out of 18 patents)

Sven Hansen (7 out of 7 patents)

4. James Hermanowski (5 out of 6 patents)

5. Katrin Fischer (4 out of 4 patents)

6. Florian Palitschka (4 out of 4 patents)

7. Kader Mekias (4 out of 4 patents)

8. Bernhard Bogner (4 out of 4 patents)

9. Matthew Stiles (4 out of 5 patents)

10. Patrick Gorun (4 out of 5 patents)

11. Johannes Platen (3 out of 3 patents)

12. Kento Kaneko (3 out of 3 patents)

13. Thomas Grund (3 out of 3 patents)

14. Rainer Targus (3 out of 3 patents)

15. Georg Fink (3 out of 3 patents)

Core Competencies:

Stamp Replication

Substrate Bonding

Wafer Alignment

Photolithography

Coating Device

Debonding Techniques

Wafer Support

End Effector

Light Source Regulation

Thermal-Slide Debonding

Mask Alignment

Fluid Flow Measurement

62 patents: Sort by Forward Citations

1. 12172344 - Stamp replication device and method for producing a holding means for a stamp replication device as well as a stamp (2024-12-24),

2. 12009230 - Bonding device as well as method for bonding substrates (2024-06-11),

3. 11776827 - Adapter, connection device and supply system (2023-10-03),

4. 11651983 - Apparatus, system, and method for handling aligned wafer pairs (2023-05-16),

5. 11504825 - Holding apparatus and method for holding a substrate (2022-11-22),

6. 11499855 - Apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device (2022-11-15),

7. 11247229 - Method for coating a substrate with a lacquer and device for planarising a lacquer layer (2022-02-15),

8. 11183401 - System and related techniques for handling aligned substrate pairs (2021-11-23),

9. 11148258 - Holding apparatus and method for holding a substrate (2021-10-19),

10. 11075102 - Positioning device (2021-07-27),

11. 11049746 - Substrate cassette (2021-06-29),

12. 10953415 - Nozzle tip adapter, nozzle assembly as well as nozzle (2021-03-23),

13. 10937681 - Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner (2021-03-02),

14. 10825705 - Apparatus, system, and method for handling aligned wafer pairs (2020-11-03),

15. 10825701 - Baking device for a wafer coated with a coating containing a solvent (2020-11-03),

Suss Microtec Lithography GmbH, based in Garching, Germany, specializes in advanced semiconductor bonding technologies. The company focuses on key areas such as stamp replication, substrate bonding, and wafer alignment, providing innovative solutions for the semiconductor manufacturing industry. Their expertise extends to photolithography, coating devices, debonding techniques, and wafer support systems, enabling high-precision processes essential for modern electronic applications. Suss Microtec is committed to advancing lithography technologies to meet the evolving demands of the market.

Profile summary based on public USPTO records.

Company Badge

USPTO Data Jan 1 1976 - Oct 6 2026

Suss Microtec Lithography Gmbh

62 Patents

#1 in Garching

#897 in Germany

#11,761 in the World

Garching, Germany

Suss Microtec Lithography Gmbh

Forward Citations = 201

63 inventors:

Gregory George (26 out of 29 patents)

Hale Johnson (14 out of 18 patents)

Sven Hansen (7 out of 7 patents)

4. James Hermanowski (5 out of 6 patents)

5. Katrin Fischer (4 out of 4 patents)

Please report any incorrect information to [email protected]

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