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Garching, Germany

Suss Microtec Lithography Gmbh

USPTO Granted Patents = 60

EPO Patents = 18

Forward Citations = 193

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63 inventors (with patents filed for the assignee):

Gregory George (26 out of 29 patents)

Hale Johnson (14 out of 18 patents)

Sven Hansen (7 out of 7 patents)

4. James Hermanowski (5 out of 6 patents)

5. Katrin Fischer (4 out of 4 patents)

6. Florian Palitschka (4 out of 4 patents)

7. Kader Mekias (4 out of 4 patents)

8. Bernhard Bogner (4 out of 4 patents)

9. Matthew Stiles (4 out of 5 patents)

10. Patrick Gorun (4 out of 5 patents)

11. Johannes Platen (3 out of 3 patents)

12. Kento Kaneko (3 out of 3 patents)

13. Thomas Grund (3 out of 3 patents)

14. Rainer Targus (3 out of 3 patents)

15. Georg Fink (3 out of 3 patents)

Core Competencies:

Stamp Replication

Substrate Bonding

Wafer Handling

Fluid Flow Measurement

Coating Techniques

Photolithography Systems

Wafer Leveling

End Effector Design

Thin Wafer Technology

Debonding Methods

Suction Apparatus

Light Source Regulation

60 patents: Sort by Forward Citations

1. 12172344 - Stamp replication device and method for producing a holding means for a stamp replication device as well as a stamp (2024-12-24),

2. 12009230 - Bonding device as well as method for bonding substrates (2024-06-11),

3. 11776827 - Adapter, connection device and supply system (2023-10-03),

4. 11651983 - Apparatus, system, and method for handling aligned wafer pairs (2023-05-16),

5. 11504825 - Holding apparatus and method for holding a substrate (2022-11-22),

6. 11499855 - Apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device (2022-11-15),

7. 11247229 - Method for coating a substrate with a lacquer and device for planarising a lacquer layer (2022-02-15),

8. 11183401 - System and related techniques for handling aligned substrate pairs (2021-11-23),

9. 11148258 - Holding apparatus and method for holding a substrate (2021-10-19),

10. 11075102 - Positioning device (2021-07-27),

11. 11049746 - Substrate cassette (2021-06-29),

12. 10953415 - Nozzle tip adapter, nozzle assembly as well as nozzle (2021-03-23),

13. 10937681 - Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner (2021-03-02),

14. 10825705 - Apparatus, system, and method for handling aligned wafer pairs (2020-11-03),

15. 10825701 - Baking device for a wafer coated with a coating containing a solvent (2020-11-03),

SUSS MicroTec Lithography GmbH is a leading manufacturer of innovative and reliable lithography equipment for the semiconductor and microelectronics industry. With over 60 years of experience, SUSS MicroTec Lithography GmbH offers cutting-edge solutions for photomask manufacturing, wafer bonding, micro-optics, and more. Their advanced lithography systems enable customers to achieve high-resolution patterning and process control, driving advancements in various fields of technology. Visit their website to learn more about their lithography products and solutions.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 23 2025

60 Patents

#2 in Garching

#941 in Germany

#11,658 in the World

Garching, Germany

Suss Microtec Lithography Gmbh

Forward Citations = 193

63 inventors:

Gregory George (26 out of 29 patents)

Hale Johnson (14 out of 18 patents)

Sven Hansen (7 out of 7 patents)

4. James Hermanowski (5 out of 6 patents)

5. Katrin Fischer (4 out of 4 patents)

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